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Acoustic Wave and Electromechanical Resonators: Concept to by Humberto Campanella

By Humberto Campanella

This groundbreaking booklet offers you a complete realizing of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical process) resonators. For the 1st time at any place, you discover wide insurance of those units at either the know-how and alertness degrees. This functional reference will give you information in layout, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the mixing of those units with regular CMOS (complementary-metal-oxide-semiconductor) applied sciences, and their software to sensing and RF platforms. in addition, this one-stop source seems on the major features, alterations, and barriers of FBAR, MEMS, and NEMS units, supporting you to settle on the precise ways on your initiatives. Over 280 illustrations and greater than a hundred thirty equations aid key themes in the course of the publication.

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Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems)

This groundbreaking ebook will give you a complete figuring out of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical process) resonators. For the 1st time wherever, you discover large insurance of those units at either the know-how and alertness degrees.

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Rev. , Vol. 56, No. 9, 1986, pp. 930–933. [8] Chou, S. , P. R. Krauss, and P. J. Renstrom, “Imprint Lithography with 25-Nanometer Resolution,” Science, Vol. 272, 1996, pp. 85–87. [9] National Science Foundation (NSF), Converging Technologies for Improving Human Performance (Nanotechnology, Biotechnology, Information Technology and Cognitive Science), 2002. htm. , H. Klank, and P. ), Microsystem Engineering of Lab-on-a-Chip Devices, New York: John Wiley & Sons, 2004. [12] Herold, K. , and A. ), Lab-on-a-Chip Technology: Fabrication and Microfluidics, San Francisco, CA: Caister Academic Press, 2009.

P. R. Krauss, and P. J. Renstrom, “Imprint Lithography with 25-Nanometer Resolution,” Science, Vol. 272, 1996, pp. 85–87. [9] National Science Foundation (NSF), Converging Technologies for Improving Human Performance (Nanotechnology, Biotechnology, Information Technology and Cognitive Science), 2002. htm. , H. Klank, and P. ), Microsystem Engineering of Lab-on-a-Chip Devices, New York: John Wiley & Sons, 2004. [12] Herold, K. , and A. ), Lab-on-a-Chip Technology: Fabrication and Microfluidics, San Francisco, CA: Caister Academic Press, 2009.

19) r where m is the magnetic moment and B is the time-varying magnetic field. 9 Ferromagnetic actuation of a MEMS cantilever. 16 MEMS and NEMS Resonator Technologies tance and time. 23) The spring constant k of the MEMS/NEMS resonator, along with its dimensions and geometry, imposes the mechanical conditions leading the structure to resonate at a certain frequency. 10 shows a quad-beam MEMS resonator with a NdFeB permanent magnet attached to it. The structure resonates at a frequency of 270 Hz when an AC current induces the external magnetic field.

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